Equipment
The nanoGUNE facilities are managed by specialists and used by researchers from a wide variety of fields.
NanoGUNE's External-Services department offers a wide range of characterization and fabrication services to external users, both academic and industrial.
NanoGUNE's equipment is presented below.
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Ion Beam Etcher (4Wave)
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Quantum Design SQUID-VSM EverCool
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Electron-Beam Lithography (Raith -150-TWO / E-line)
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Dual-beam FIB/SEM - FEI Helios Nanolab / FEI Helios 450S
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Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments)
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X-ray reflectivity/diffractometry (X'pert PRO by PANalytical)
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Quantum Design PPMS
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Magneto-Optical Kerr Effect (MOKE) set-up
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Magneto-Optical Kerr Effect (MOKE) microscope
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UHV Sputtering System (AJA Int.)
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Oerlikon - UNIVEX 350 / EPVD75 Kurt J. Lesker
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ALD Cambridge Nanotech Savannah S100
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Leica EM MED020 / Quorum technologies Q150 T ES
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Double Pack Oven, 650ºC UNITEMP RSO-650-200
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ALD Beneq TFS 200
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Mask aligner (EVG)
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FTIR Spectrometer PerkinElmer Frontier
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Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250)
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High power industrial Picosecond Laser
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High-resolution Transmission Electron Microscope (HRTEM)
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Four point probe
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STM/AFM (4 K) in UHV with light detection set-up
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STM/AFM (1 K) in UHV with magnetic field
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Electrospinning
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Reactive ion etcher (RIE Oxford Plasmalab 80 Plus)
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Spectroscopic ellipsometrer (GES5 spectroscopic-ellipsometer SEMILAB)
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RAMGRABER Wet benches
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NIR Raman spectroscopy
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Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments)
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Spectroscopic ellipsometer (GES5 spectroscopic-ellipsometer SEMILAB)
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FTIR Spectrometer PerkinElmer Frontier
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Scattering-type near-field microscope (NeaSpec)
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Plasma asher
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Universal mechanical tester (UMT)
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Microscopy Platform for Materials Research
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UV-NIR Spectrometry
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3D Optical Profiler
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Surface Plasmon Resonance Platform
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Scattering-type near-field microscope (Neaspec)
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CRYO Plasma FIB
Cleanroom
The nanoGUNE cleanroom, dedicated to fabricate and characterize the properties of materials on the nanoscale, ia a 300m2 laboratory where the air purity is under strict supervision.
Facilities & Equipment
A unique infrastructure of 6 200 m2 was set up to host a cleanroom of nearly 300m2 and 15 ultra-sensitive laboratories with state-of-the-art equipment.