Double Pack Oven, 650ºC UNITEMP RSO-650-200
High temperature oven used for heat treatments such a annealing and oxidation of thin film layers.
Technical characteristics
- Two quartz glass process chambers with integrated gas in- and outlet
- Top and bottom heating
- Maximum Temperature: 650ºC
- Ramp up rate: 75ºC/s
- Loading area (2x quartz tray): 170 mm x 200 mm
- Vacuum for external pump system (up to 1x10-3 mbar)
- Controller: fast PID temperature process controller, 100 steps programmable (temperature steps), free programmable process gas flow
Cleanroom
CR2 - Photo Bay
Related Techniques
Cleanroom
The nanoGUNE cleanroom, dedicated to fabricate and characterize the properties of materials on the nanoscale, ia a 300m2 laboratory where the air purity is under strict supervision.
Equipment
State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.