Focused Ion Beam (FIB) and Focused electron/ion beam induced deposition (FE(I)BID), system used for surface patterning and complex structures fabrication.
Electron column resolution 0.5 nm at 15 kV and 0.8 nm at 1 kV (STEM)
FIB milling resolution 10 nm at 30 kV
GIS percursor for FE(I)BID: platinum, silicon oxide, gold, tungsten, cobalt
Nanomanipulator with microgripper (Kleindiek)
LN2 cooling stage (CryoMat )
EDX silicon drift detectors for elemental analysis (EDAX)
Detectors: ETD SE, True in-Lens Detector (TLD), STEM II detector, High performance Ion Conversion and Electron (ICE), Concentric Back Scatter (CBS) detector
iFast software for advanced Dual Beam automation in order to automate the imaging and nanofabrication
MAPSTM for automatic acquisition of extra large images with high resolution
AutoSlice&ViewTM software for 3D imaging by sequential sectioning of the sample
The nanoGUNE cleanroom, dedicated to fabricate and characterize the properties of materials on the nanoscale, ia a 300m2 laboratory where the air purity is under strict supervision.
State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.