Method for producing a barrier layer and carrier body comprising such a barrier layer
Method for producing a barrier layer and carrier body comprising such a barrier layer
K. Gregorczyk, M. Knez, F. Vollkommer, J. Bauer, and K. Dieter-Bauer
Priority date:
Granted:
USA (15/10/19), China (28/04/2020), Europe (02/12/2020), Republic of Korea (20/07/2021)
Method for producing a barrier layer and carrier body comprising such a barrier layer
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